WHITE LIGHT INTERFEROMETRIC MICROSCOPE SYSTEM

Nikon BW Series

Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications.

• Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process
• Enables measurements with the same height resolution in a wide range of magnifications
• Enables measurement of both smooth and rough surfaces without changing measurement mode or optical filters
• Captures both an all-in-focus image and a surface height image

• The system can be used as an optical microscope. Brightfield, polarizing, DIC and fluorescence observations are all possible

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SiC Wafer: Sub-nano-level measurement in a wide range of magnifications

Type: BW-D501 system, Subject: Silicon Carbide (SiC) Wafer

Sa 0.483nm, Sq 0.645nm, Sz 7.460nm

Sa 0.302nm, Sq 0.401nm, Sz 11.187nm

Sa 0.144nm, Sq 0.545nm, Sz 121.859nm

Sa 0.391nm, Sq 0.495nm, Sz 3.934nm

Sa 0.306nm, Sq 0.398nm, Sz 3.264nm

Subject: Razor-edge

Surface roughness of paper (Synthetic, Plain, Gloss, Matte)

Surface roughness of synthetic paper

Surface roughness of gloss paper

Surface roughness of plain paper

Surface roughness of matte paper

Surface roughness of ceramics

Precise surface measurements for micrometer-range rough surfaces

Type: BW-A501 system, Subject: Membrane of synthesized diamond using in-liquid plasma chemical vapor deposition, Photos courtesy of Ph.D. Hiromichi Toyota, Ehime University Graduate School of Science and Engineering

IC package: Micrometer-range measurement in a wide range of magnifications

Height calibration with the NIST-certified VLSI standard

BW-D501 system